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Recent Advances of Capacitive Sensors: Materials, Microstructure …

In this design, capacitive sensing was combined with resistive sensing mechanism to independently perform the pressure and temperature sensing, respectively. The dual-mode sensor was designed with a sandwich structure with two electrodes on the top and bottom of the structure, and the top electrodes was endowed with extra ability to generate …

MOSFE-Capacitor Silicon Carbide-Based Hydrogen …

Abstract. The features of the wide band gap SiC semiconductor use in the capacitive MOSFE sensors'' structure in terms of the hydrogen gas sensitivity effect, the response speed, and the …

Metal oxide semiconductor thin-film transistors for gas sensing …

Using this structure, the reducing gas NH 3 was sensed at a comparatively low temperature of 150 C. The sensing mechanism is quite different from other TFT-based sensors. The sensing and readout elements have different roles in gas detection.

Oxide trap states versus gas sensing in SiC-MOS capacitors – The effect of N

A novel hydrogen sensor based on Pd/SiO 2 /SiC capacitors with field oxide ramp termination was fabricated, and a systematic investigation of the most utilized post oxidation annealing (POA) processes, in N or P based ambient, was realized in order to propose the most appropriate technological approach. ...

Influence of nanoscale TiO<SUB>2</SUB> film thickness on gas sensing properties of capacitor-like Pt/TiO<SUB>2</SUB>/Pt sensing structure …

Due to the combustible and explosive nature of hydrogen, it is important to keep its safety during the production, storage, transportation and utilization. To this context, new type of sensors based on TiO<SUB>2</SUB> nano-films with 100, 50 and 30 nm thickness and capacitor-like sandwiched Pt/TiO<SUB>2</SUB>/Pt structure were fabricated to …

Characterization and hydrogen gas sensing properties of TiO2 …

Introduction There is, nowadays, a great demand for hydrogen gas sensors, since hydrogen is emerging as an important source of energy. Among others, metal oxide (MOX) sensors based on SnO 2, ZnO, WO 3, TiO 2 and other oxides have attracted much attention in the field of gas sensing due to their low cost and flexibility in …

Influence of nanoscale TiO2 film thickness on gas sensing properties of capacitor-like Pt/TiO2/Pt sensing structure …

To this context, new type of sensors based on TiO2 nano-films with 100, 50 and 30 nm thickness and capacitor-like sandwiched Pt/TiO2/Pt structure were fabricated to monitor the hydrogen leakage. The gas sensing tests indicate that sensing performance

Influence of nanoscale TiO2 film thickness on gas sensing …

Novel capacitor-like gas sensor based on nanoscale thick TiO 2 film was fabricated. • Sensing performance increase as the thickness of TiO 2 film decreased. • I …

The effect of Nb doping on hydrogen gas sensing properties of …

Hydrogen gas sensors with capacitor-like Pt/Nb-TiO 2 /Pt structure and various amount of Nb doping were successfully prepared by magnetron sputtering and lift …

Nanomaterials | Free Full-Text | Anodic Aluminum Oxide-Based Chemi-Capacitive Sensor for Ethanol Gas …

Capacitive gas sensors are used to detect changes in the dielectric constant upon adsorption of the target gas onto the sensing material of the sensor. The dielectric constants of dry air, alcohol vapor, and water vapor, which can affect alcohol sensor measurements, are 1.0006, 1.0061, and 1.0126, respectively [ 30 ].

Sensors | Free Full-Text | Polyimide-Based Capacitive Humidity …

The development of humidity sensors with simple transduction principles attracts considerable interest by both scientific researchers and industrial companies. Capacitive humidity sensors, based on polyimide sensing material with different thickness and surface morphologies, are prepared. The surface morphology of the sensing layer is varied from …

3D printing hydrogel with structural design via vat photopolymerization for strain sensing …

Evidently, Fig. 9 c reveals that the hydrogel dielectric layer with a convex surface structure exhibits higher compression sensitivity, and the gradient structure confers more significant advantages in the sensing characteristics of the capacitive sensor.

Hydrogen sensor based on silicon carbide (SiC) MOS capacitor

Silicon carbide (SiC) based MOS capacitor devices are used for gas sensing in high temperature and chemically reactive environments. A SiC MOS capacitor structure used …

Materials for Capacitance-Based Gas Sensors | SpringerLink

In capacitance-type gas sensing, two different approaches have been followed to date (Hagleitner et al. 2001; Chatzandroulis et al. 2011). In one approach, the …

Resistance-Capacitance Gas Sensor Based on Fractal Geometry …

An important component of any chemiresistive gas sensor is the way in which the resistance of the sensing film is interrogated. The geometrical structure of an …

High sensitivity MEMS capacitive hydrogen sensor with inverted …

We report a novel palladium (Pd)-based micro electro-mechanical system (MEMS) capacitive hydrogen gas sensor that has an inverted T-shaped electrode and a ring-shaped Pd alloy layer, which enable high sensitivity and low power consumption. Thanks to these ...

Interfacing circuit for capacitive sensors

In the Φ 2 phase, this charge is transferred to the feedback capacitor, which compensates the charge mismatch in the sensing capacitors in the reset phase. The output voltage can be expressed as where ∆ C sense is the capacitance change due to applied input and ∆ C mismatch is the mismatch in the sensing capacitors without any external input.

Influence of nanoscale TiO2 film thickness on gas sensing properties of capacitor-like Pt/TiO2/Pt sensing structure …

Request PDF | Influence of nanoscale TiO2 film thickness on gas sensing properties of capacitor-like Pt/TiO2/Pt sensing structure | Due to the combustible and explosive nature of ...

Chemosensors | Free Full-Text | Resistance-Capacitance Gas …

An important component of any chemiresistive gas sensor is the way in which the resistance of the sensing film is interrogated. The geometrical structure of an electrode can enhance the performance of a gas-sensing device and in particular the performance of sensing films with large surface areas, such as carbon nanotubes. In this …

Flexible hydrogen gas sensor based on a capacitor-like Pt/TiO2/Pt structure …

Semantic Scholar extracted view of "Flexible hydrogen gas sensor based on a capacitor-like Pt/TiO2/Pt structure on polyimide foil" by Marek Vidiš et al. DOI: 10.1016/J.IJHYDENE.2021.03.052 Corpus ID: 233532724 Flexible …

A low-power, high-resolution, adaptive sensitivity readout circuit with selective detection range for capacitive …

To formulate the proposed sensing structure in Fig. 6 and for simplicity, consider the feedback capacitor of the sensing and the reference OTAs as C f 1. The signal in the sensing OTA is amplified with the gain as in (3), where C s represents the sensing electrode capacitance variation due to analyte exposure, and C in 1 is the input …

Flexible hydrogen gas sensor based on a capacitor-like Pt/TiO2/Pt structure …

In this work, a flexible hydrogen gas sensor with such capacitor-like Pt/TiO2/Pt electrode arrangement fabricated on polyimide foil is presented and characterized in terms of hydrogen gas sensing ...

Recent progress in flexible capacitive sensors: Structures and properties

To fabricate an integrated system of flexible and stretchable capacitive sensors for wearable health monitoring usually includes: (1) conductive electrode [52]; (2) flexible/stretchable dielectric layer [43, 49]; (3) occasionally including packaging materials [18].This section will introduce the electrode materials and dielectric layers of capacitive …

Field-Effect Transistors for Gas Sensing

This chapter reviews gas-sensitive field-effect transistors (FETs) for gas sensing. Although various types of gas sensors have been reported, this review focuses on FET-based sensors such as catalytic-gate FETs, solid electrolyte-based FETs, suspended-gate FETs, and nanomaterial-based FETs. For recognition of analytes in the gas phase, …

Review of Thin Film Transistor Gas Sensors: Comparison with Resistive and Capacitive …

The present review concerns thin film field effect transistor (TFT)-based gas sensors with special emphasis on material synthesis, electrical characterizations and sensing properties. A comparative analysis of TFT sensors with that of resistive and capacitive sensors is carried out. Comparison reveals that resistive and capacitive sensors have higher …

Production of a hybrid capacitive storage device via hydrogen gas …

a CV curves of EHGC and EDLC at a scan rate of 10 mV s −1. b Charge/discharge curves of EHGC and EDLC at a specific current of 1 A g −1. c Charge/discharge curves at a voltage range of 0–1.2 ...

Sensors | Free Full-Text | Advanced Micro

Capacitive-based and resonant frequency CNT sensors: CNTs can be used as the sensing element of capacitive-based gas sensors. In this structure, one plate of the capacitor is silicon and the …

Sensors | Free Full-Text | Advancements in Passive Wireless …

The gas sensing results demonstrate a higher response than the pure ZFO sensor under the same conditions for the selected gas concentration and operating temperature range []. In addition, V Galstyan and A. Ponzoni developed hybrid structures using GO and niobium-doped titanium dioxide nanotubes (NT), which can detect …

Oxide trap states versus gas sensing in SiC-MOS capacitors – The effect of N

A comparative in-depth analysis of the N or P based post oxidation annealing (POA) effects on both the Pd/SiO 2 /SiC structure parameters and the hydrogen sensing performances was performed. The interface states density was reduced with more than one order ...

Review paper MXenes: A comprehensive review of synthesis, properties, and progress in supercapacitor …

MXenes are attractive electrode materials for electric double-layer capacitors (EDLCs) and pseudocapacitors due to their distinctive structures and features. This has allowed for the development of supercapacitors that are characterized by outstanding rate capabilities and high energy densities [ 75 ].

Resistive, Capacitive and Temperature Sensor Interfacing Overview

In this sense, the pressure sensor may utilize different sensing thin films, each of them having the same area. Fig. 2.15 shows the simplified scheme of a CMOS-MEMS sensing cell, developed as a capacitive pressure sensor, where, considering the …

Micro/nanostructured gas sensors: the physics behind …

Micro/nano sensors are essential for detecting toxic polluting gases for controlling vehicle and industrial emissions, ensuring home security, and …

Use of nanostructured and modified TiO2 as a gas sensing agent

The sensing procedure is generally mainly based on the change of the electrical resistance of the sensors in response to the chemical reactions between the sensing material and target gas. [69, 70].

Resistive and Capacitive Measurement of Nano-Structured Gas …

Planar device structure is perhaps the most attractive and most frequently/commonly used device structure for gas sensing application, due to the …

Flexible hydrogen gas sensor based on a capacitor-like …

In summary, metal oxide semiconductor (MOS) gas sensor of hydrogen with a capacitor-like Pt/TiO 2 /Pt electrode arrangement has been prepared on flexible polyimide substrate and characterized in terms of bending endurance and hydrogen gas …

Development of Gas Sensor Based on Fractal Substrate Structures

Gas sensor plays a key role in many applications with sensitivity being a critical performance characteristic. Increasing the surface area of gas sensing material is one approach that can increase sensitivity. Fractal geometries, which have the large specific surface area and special fractal dimension, have previously been successfully used in the …

FDC1004: Basics of Capacitive Sensing and Applications (Rev.

Figure 4-1. FDC1004 Capacitive Sensing Theory of Operation Capacitive Sensing Versus Capacitive Touch 4 FDC1004: Basics of Capacitive Sensing and Applications SNOA927A – DECEMBER 2014 – REVISED JUNE 2021 Submit Document